Main
features:
- UHV chamber with a movable (3 translations
and one rotation) stage
- Hemispherical analyzer and mirror for XPS
spectroscopy and imaging. To find out how the imaging
works you can refer to ULTRA schematic
drawing. For more details you can visit the ULTRA
overview pages.
- Polarity change for Ion Scattering Spectroscopy (ISS))
- Separate chamber for Temperature Programmed Desorption
(TPD). equipped
with RF mass-analyzer (Hiden Analytical) and heating controller
(Micromega). Temperatures from LN to 600 C are achievable.
- Ion source MINIBEAM 1 installed for sputter cleaning
or depth profiling
- In-situ transfer of samples to the chambers for TPD
and ToF-SIMS
- UHV vessel with independent pumping for transfer of
samples to other instruments
- Glove box for loading of samples in a controlled environment
Sample
requirements and sample holders:
Please read the appropriate
section for the AXIS-165 spectrometer
Location:
CCIS, Rm. L2-356 |
