Main features:

• Field emission cathode
• UHV chamber with a movable (3 translations and one rotation) stage
• Electron optics column for SEM
• Hemispherical analyzer for AES spectroscopy with 7 channeltron detectors
• Ion source for depth profiling and in-situ sample cleaning. Rotary motion of the target is optional to ensure homogenious etching
• Sample holders available:

- dia 12 and 20 mm for samples upto 4 mm thick

- 120 mm wafer holder

- cross-sectionned sample holder for up to 7 mm thickness

• The instrument layout is illustrated in the JAMP instruments schematic drawings. For more details you can also visit the JAMP overview pages.

Location: CCIS building, Rm. L2-340/342

Examples: Please visit the AES page