Main
Features:
- Low Vacuum Mode, LVM (variable nitrogen pressure)
- High Vacuum Mode, HVM (pressure < 3 x 10-3 Pa)
Accelerating voltage: 200 eV to 30 keV
Tilt: +/- 90 degr, 3D reconstruction avaialble
Detectors: SEM, BSE (in HVM only), EDXS (LN-free, 10 cm, 133
eV resolution)
Samples:
- conducting in HVM, conducting/non-conducting in LVM. Non-conducting
samples should be coated in advance to meet the HVM requirements
- powders/wafers are mounted on standard SEM stubs, solid pieces
should be less than 15 cm in diameter
More details about the options offered by the SEM amd EDS instruments
can be found in the Vega-3
Manual and INCA
Manual.
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